Metrology system for flat optics

Metrology system for flat optics

MESO metrology system is a one-stop solution for in situ process control of flat optics. A unique instrument allows to measure at several different wavelengths with no chromatic aberration and to characterize optics with a large range of diameters with no loss in resolution.


  • LIFT-enhanced ultra-high wavefront sensing resolution
  • POP-patented procedure for the testing of (thin) plane parallel optics
  • Spot Tracker™ proprietary technology for absolute measurement of tilt and wavefront.


  • Insensitive to vibrations
  • At-design wavelength testing
  • Insensitive to reflections from sample back surface


  • Parallel Optics
  • Screens
  • Filters, dichroics
  • Mirrors
  • Beamsplitters
  • Windows
  • Substrates
  • Corner cubes
  • Crystals
  • Rods, Disks
  • Glass wafers
  • Displays
  • Machined surfaces
  • Windshields
  • Prisms
  • Large lenses
  • Optical systems
  • Beam expanders


  • Horizontal or vertical integration
  • Optical zoom from 1,5’’ (38,1mm) up to 6’’ (152mm)
  • Testing wavelengths from 405nm to 1064nm
  • 680 x 500 phase points resolution
  • 27us minimum acquisition time

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