Metrology system for flat optics
- Details
- Published on 31 March 2023
MESO metrology system is a one-stop solution for in situ process control of flat optics. A unique instrument allows to measure at several different wavelengths with no chromatic aberration and to characterize optics with a large range of diameters with no loss in resolution.
KEY INNOVATIONS :
- LIFT-enhanced ultra-high wavefront sensing resolution
- POP-patented procedure for the testing of (thin) plane parallel optics
- Spot Tracker™ proprietary technology for absolute measurement of tilt and wavefront.
KEY FEATURES :
- Insensitive to vibrations
- At-design wavelength testing
- Insensitive to reflections from sample back surface
APPLICATIONS :
- Parallel Optics
- Screens
- Filters, dichroics
- Mirrors
- Beamsplitters
- Windows
- Substrates
- Corner cubes
- Crystals
- Rods, Disks
- Glass wafers
- Displays
- Machined surfaces
- Windshields
- Prisms
- Large lenses
- Optical systems
- Beam expanders
KEY SPECS :
- Horizontal or vertical integration
- Optical zoom from 1,5’’ (38,1mm) up to 6’’ (152mm)
- Testing wavelengths from 405nm to 1064nm
- 680 x 500 phase points resolution
- 27us minimum acquisition time
More information :
https://www.imagine-optic.com/products/meso-metrology-system/
