Rotation stage
- Details
- Published on 14 June 2018
The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution for point-to-point indexing or constant velocity scanning. The RL stages offer superior travel accuracy, flatness, and wobble performance. Absolute encoders supply explicit position information that enables immediate determination of the position: referencing is not required during switch-on, which increases efficiency and safety during operation. Applications include optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning. Thanks to the friction-free motion, no particles are formed, which allows PIglide stages to be used in cleanroom applications.
See also: PI’s new catalog for positioning solutions using piezo systems
